Tosoh Quartz Corporation

We carry many types of products, from minute precision products, to large-size LCD/OEL photomask substrates, to products used for semiconductor manufacturing. These products vary in size from several millimeters to several meters. Demand for increased precision and miniaturization has been increasing not only for our precision products but for our large-size products as well. To meet this demand, we are improving component technology including our high precision micro-holing and polishing processes. As we do this, we are also working to automate each related process.

As the semiconductor process becomes increasingly miniaturized, silica glass products are required to have ever higher levels of purity, with fewer particles and lower rates of contamination. Our company is attempting to reduce the amount of particles and contaminants caused by processing by using highly purified materials to make the products themselves more highly purified, and by creating a clean environment and performing high quality cleanings during each process or after the product has been completed. Improving total clean technology is the key to providing these highly-pure and highly-clean products.