LCD/OEL Photomask Substrate
As-Cut Substrate/Polished Substrate
Our company uses exclusive photomask-use grade synthetic silica glass (ES grade) manufactured by Tosoh SGM. This material has excellent UV transmittance, laser-resistance and purity, and is used as a raw material for photomask substrates. In order to meet the demand for larger size photomasks, we mass-produce one of the largest synthetic silica glass ingots in the world, and are able to supply larger-than 10th generation-sized products for As-Cut substrates.
◎Standard Size for As-Cut Substrate
| Narrow Side (mm) | Long Side (mm) | Thickness (mm) |
|---|---|---|
| 520 | 800 | 11 |
| 700 | 800 | 9 |
| 800 | 920 | 9 |
| 800 | 920 | 11 |
| 800 | 960 | 9 |
| 850 | 1,200 | 11 |
| 850 | 1,400 | 11 |
| 1,220 | 1,400 | 14 |
| 1,620 | 1,780 | 17 |
Other sizes are also available. Please ask.